>1.0E-11 mbar l/s
>5.0E-7 mbar l/s
>2.0E-7 mbar l/s
최소 탐지 누설율: 0.05 g/a (0.002 oz/yr)
최소탐지 누설율: ≤ 1E-11 mbar l/s (>5 l/s helium pumping speed)
최소 검출 누설률: 1E-7 mbar l/s or cc/s with 5% H2