>1.0E-11 mbar l/s

>5.0E-7 mbar l/s

>2.0E-7 mbar l/s

최소 탐지 누설율: 0.05 g/a (0.002 oz/yr)

최소탐지 누설율: ≤ 1E-11 mbar l/s (＞5 l/s helium pumping speed)

최소 검출 누설률: 1E-7 mbar l/s or cc/s with 5% H2